Triple Thermal Evaporation Desktop Coating System

EVAPORATION COATERS

Triple Thermal Evaporation Desktop Coating System

The Vac Techniche triple thermal source desktop coater provides a very versatile thermal evaporation system for a vast range of source materials in various forms from wire, cord, pellets and powders, compatible with Boat/basket and coil source holders.

For ease of use, the touch 7″ colour screen control with fully automatic control, data input, and display is designed for easy use for experienced and inexperienced operators.

The control system allows upto 300 historical processed to be recorded.

Three independent heat resistance thermal evaporation sources.

Evaporation source holder designed causes no contamination from source materials on each other.

The length of the source holders can be adjusted in the range of 50mm~90mm.

Co-Evaporation upgrade available

Evaporation sources

    • boat
    • basket
    • coil/wire

 

Vacuum System consists of:

Heat resistance, Cylindrical Pyrex with 300 mm OD and 200 mm H.

90 L/s turbomolecular pump fitted directly to tge vacuum envelop base plate and backed by a Vac Coat 4m3/h two-stage rotary pump which introduces clean vacuum without the oil contamination that is normally present with an ordinary diffusion pump

Dry backing pump option is also available

The DTT triple evaporation source selection is ideal for deposition of multilayers or alloys.

The DTT, with integral turbo pumping reaches pressure quickly allowing the coating process to commence in a matter of minutes. It is ideal for research, laboratory and product applications

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Applications

  • Metal & dielectric Films
  • Thin film coating
  • Optical coatings
  • Nano & Microelectronic
  • Medical Components
  • Magnetic devices
  • Thin film Multi-layer devices

 

 

DTT Features

  • Multi boats, baskets and coils installation
  • Ultimate Vacuum: Less than 2×10-6torr
  • Records and plots coating parameters graphs
  • Transfers the curves and deposition process data by USB port to PC
  • Automatic control of the power of coating independent of pressure
  • High current electrical feed through
  • 0-100 high current, protected against short circuit, DC power supply
  • Co – evaporation to form alloy films (optional).
  • Equipped with rotary sample holder (optional).
  • 500 °C irradiative substrate heater (optional).
  • Utilities: 220V- 50HZ- 16A
  • Dimensions: 60 Cm H × 65 Cm W × 50 Cm D
  • Shipping weight: ~ 60 kg

Specifications

  • Multi-layer thermal coatings.
  • Large format chamber.
  • High vacuum turbo pump 90 l/s.
  • Ultimate pressure 5 x10-6
  • Two stage rotary vain backing pump, 4 m3/h.
  • Full range vacuum gauge.
  • Evaporation source (boat / basket / coil) selection for multilayer thin film deposition.
  • Co – evaporation to form alloy films (optional).
  • Quartz crystal monitoring system for real time thickness measurement (1 nm precision).
  • Manual or automatic Timed or Thickness deposition.
  • Intuitive touch screen to control the coating process and rapid data input.
  • User friendly software that can be updated via network.
  • Equipped with electronic shutter.
  • Equipped with rotary sample holder (optional).
  • 500 °C irradiative substrate heater (optional).
  • Two-year warranty.

Options and Accessories

The DTT has the flowing options and accessories:

  • Co – evaporation to form alloy films (optional).
  • Equipped with rotary sample holder (optional).
  • 500 °C irradiative substrate heater (optional).
  • Quartz crystal
  • Spare glass
  • Mass flow controller for gas control
  • Evaporation sources (boat / basket / coil)
  • Thermal source materials
  • Mass Flow Controller