DSCT: Turbo Sputter/Carbon coating Desktop system for SEM/TEM

Vac Techniche DESKTOP COATERS

Desktop SEM/TEM Sputter and Carbon Coater DSCT

Sample preparation using sputter coating is the recognised method for non-conductive and low conductive specimens or samples, this system is also suitable for optical coatings.
Vac Techniche  DSCT has been developed to exceed the requirements for SEM/TEM sample preparation.
The compact and easy to use sputter coater, with onboard Turbomolecular Pumping
Use supplied backing vacuum pump or your own, all controlled with the  processor controller.
The Vac Techniche Desktop Sputter Coater enables thin film sputter coating of noble metals: gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) on non-conductive or poorly conductive samples or devices.
Our board processor integration makes the Desktop Sputter coater an ideal laboratory and research tool for scanning electron microscopy (SEM) and Transmission electron microscopy analysis(TEM).
One of the benefits of our DSCT design is the rapid pump-down time making it a production tool in addition to a research instrument, for applications such as optical coatings.
Repeatable results when used in Automatic mode for Thin films are deposition.

Carbon coating attachment

DSCT  has the  Carbon Fibre Coating attachment, ideal for SEM/TEM preparation, using the separate attachment keeping the Carbon coating  from contaminating the sputtering head and visa versa.

Carbon Rod evaporation is also available on request.

 

Applications

  • 2″ sputter head
  • Carbon Fibre Head
  • Carbon Rod head upgrade option
  • quartz crystal thickness monitor.
  • Touch screen control.
  • Rapid data input.
  • User friendly software.
  • Accurate Control of coating rate.
  • Manual Control option for Time and Thickness sputtering.
  • Manual settings, Time, Thickness and sputtering power.
  • Automatic Timed and Thickness sputtering.
  • Rotation stage as standard.
  • Two-year warranty
  • CE conformity

Features

  • Dry vacuum pump upgrade option
  • 2″ sputter head
  • Carbon Fibre head
  • quartz crystal thickness monitor.
  • Touch screen control.
  • Rapid data input.
  • User friendly software.
  • Accurate Control of coating rate.
  • Manual Control option for Time and Thickness sputtering.
  • Manual settings, Time, Thickness and sputtering power.
  • Automatic Timed and Thickness sputtering.
  • Rotation stage as standard.
  • Two-year warranty
  • CE conformity

Specifications

  • Control Panel: 7” touch screen, programming, handling, parameters illustration
  • Single Straight Magnetron Cathode: Suitable for 2” Targets,
  • Carbon fibre  head easily changeable for carbon fibre evaporation.
  • High current pulsed power supply for carbon evaporation (24V-100A)
  • Film Thickness Monitor: Program ability and 1nm precession Thermocouple Gauge: Show 0.001-1 mbar
  • Vacuum Chamber: Pyrex cylinder chamber 300 mm OD x h200 mm, Thick 7mm
  • DC Power Supply 0-100 mA for sputtering
  • Sample Holder: Motorised sample holder
  • Electronic leak valve: 1 MFC: 0-100 sccm for Argon and reactive gas.
  • Shutter: Electronic shutter
  • Main Body: Metallic-cubic-30*50*50 cm
  • Turbo Pump: 90 l/s (Leybold)
  • Backing Pump:  4m/h two stage rotary pump
  • Vacuum Gauge: Combination of Pirani and Penning (Leybold)
  • Vent valve: ¼” electrical
  • Packaging: Wheeled box
  • 24-month warrantee on all parts expect pumps
  • 12-month warrantee on Leybold parts

Options and Accessories

The DSCT  has the flowing options and accessories:

  • Carbon coating head with 100A power supply for carbon rod evaporation. Not fully automatic
  • Quartz crystal
  • Planetary Sample rotation
  • Spare glass
  • Gold target (Au), 2 Inches diameter, 0.15 thick
  • Silver target (Ag), 2 Inches diameter, 0.3 thick
  • Platinum target (Pt), 2 Inches diameter, 0.15 thick
  • Upgrade to dry pumping system, Leybold Diaphragm 1.4 m^3/h vacuum backing pump
  • Sputtering targets
  • Carbon Fibre