Thermal evaporation sources (Boat / Basket / Coil)
The PLD – T can be fitted with three independent heat resistance thermal evaporation sources. The good design of the evaporation source holder causes no contamination transfer from sources materials to other materials. The length of source holders can be adjusted in the range of 10 – 5 cm which meets the costumer requirement.
PLD – T is equipped with a multi-target manipulator which includes three 2 cm diameter. targets as standard.
All of our target manipulators are motorized and includes target rotation.
Vacuum Chamber – The vacuum chamber is a 300 mm OD x 250 mm H, stainless steel with four 2” windows. Considering that the energy source (pulsed laser) is outside the deposition chamber, PLD technique is extremely clean process for thin film deposition and it facilitates a large dynamic range of operating pressures.
Touch screen control with colourful display
The system is equipped with a 7” coloured touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coatings can be saved in the history page.