DST1-170, Turbo – Pumped Desk Sputter Coater: The magnetron desk sputter coater model DST1 is a compact coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time.
The DST1 is equipped with a magnetron cathode with diameter of the cathode could be 2-4 inches depending on the requirement.
Larger chamber sputter systems in DST range:DST1-300
DST1 – 2: The DST1-2 is configured as a sputter coater and fibre carbon coater (optional) with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation.
This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD.
The DST1-2 with a 2” magnetron cathode, 300 W RF power supply (optional) with matching box, 80 W switching DC power supply and high current power supply for carbon evaporation (optional), could be used for research and different thin film applications
DST1 – 4: The large chamber DST1-4 with a 4” magnetron cathode, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation