DST1,2,3-300 Desktop Turbo-Pumped Sputter Coater by Vac Techniche

DESKTOP COATERS

Vac Techniche DST1-300 Turbo-Pumped Sputter Coater

With one of the smallest benchtop footprints, DST1-300 provide DC and RF sputtering for high resolution SEM and TEM sample preparation.

The DST1-300 range provides the following versions to satisfy most laboratory applications.

  • DST1-300 Single magnetron, DC, RF, sample Bias, sample heating, Sample rotation
  • DST2-A Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation.
  • DST2-TA Two magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST2-S Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST2-TS Two magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST3-A Three magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation.
  • DST3-TA Three magnetrons angled central focal point, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation facility for carbon, wire or boat.
  • DST3-S Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation.
  • DST3-TS Three magnetrons straight, DC, RF sample Bias, sample heating, Sample rotation, single thermal evaporation for carbon, wire or boat.

4″ magnetron option is also available.

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Applications

DST1, Turbo – Pumped Desk Sputter Coater: The magnetron desk sputter coater model DST1 is a compact coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time.

The DST1 is equipped with a magnetron cathode with diameter of the cathode could be 2-4 inches depending on the requirement.

DST1 – 2: The DST1-2 is configured as a sputter coater and fibre carbon coater (optional) with interchangeable heads in one instrument suitable for Scanning Electron Microscope (SEM) sample preparation.

This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD.

The DST2- with 2 x 2” magnetron cathode, 300 W RF power supply (optional) with matching box, 80 W switching DC power supply and high current power supply for carbon evaporation (optional), could be used for research and different thin film applications

 

The DST3- with 3 x 2” magnetron cathode, 300 W RF power supply (optional) with matching box, 80 W switching DC power supply and high current power supply for carbon evaporation (optional), could be used for research and different thin film applications

​DST1 – 4: The large chamber DST1-4 with a 4” magnetron cathode, water-cooled, is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter. The unlimited sputtering time makes it suitable for deposition of thick layer. The system is equipped with 800 W DC power supplies, 300 W RF power supply (optional) with matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation

Features

  • High vacuum turbo pump.
  • Diaphragm backing pump.
  • Full range vacuum gauge.
  • Carbon fibre evaporation option
  • Pulsed or flash carbon fibre coating modes option
  • High precision quartz crystal thickness monitor.
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network.
  • Controls coating rate to achieve finer grain structures.
  • Manual or automatic Timed and Thickness sputtering.
  • Able to record and plot coating parameters graphs.
  • Equipped with electronic shutter.
  • Easy-to-change specimen stages (rotation stage as standard).
  • Two-year warranty.

Touch screen control with colored display

The DST desk sputter coater is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coatings can be saved in the history page.

Pulsed Carbon Fiber Evaporation

Desktop vacuum sputter /carbon coater is able to perform pulsed carbon fiber evaporation. Short pulses provide more controlled deposition and significantly reduces the amount of debris associated with traditional carbon deposition.

Sample Stages

The DST1 can be equipped with different sample stage configurations depending on the user requirements. The sample stages are rotatable with adjustable height that can be changed easily.

The rotary planetary sample stage is a good choice for uniform coating of porous specimens.

Clean Vacuum

The vacuum chamber is a Cylindrical Pyrex with 300 mm OD and 200 mm H (DST1-4) / 170 mm OD x 140 mm H (DST1-2). The DST1 is fitted with an internally mounted turbomolecular pump, backed by a diaphragm pump which introduces clean vacuum without oil contamination which normally present in ordinary diffusion pump.

Specifications

  • Ultimate Vacuum: Less than 2×10-5 torr.
  • Controls the rate of sputtering to achieve finer grain structure.
  • Automatically controls the power of sputtering independent of pressure.
  • Precision Mass Flow meter (MFC) for fine control of the vacuum pressure
  • Able to record and plot coating parameter graphs.
  • Transfers curves and deposition process data by USB port to PC.
  • Utilities: 220V- 50HZ- 16A.
  • Shipping Weight (DST1-4): 36kg

Options and Accessories

Desktop Sputter coater model DST has the flowing options and accessories:

  • Planetary sample rotation
  • Fibre carbon Evaporation
  • Wire evaporation
  • Boat evaporation
  • Substrate DC bias voltage (DST1-3).
  • Substrate Heating
  • RF for oxide sputtering
  • Substrate heater 500c (DST1-4).
  • 300W RF sputtering (DST1-4).
  • Quartz crystal.
  • Spare glass.
  • Sputtering targets.

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